ClassOne to Showcase its New High-Sensitivity Particle Inspection System at SEMICON West 2022

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ClassOne Equipment will be showing the new high-performance Takano WM-7SR particle inspection system in its exhibit at SEMICON West in San Francisco held from July 12 to 14, 2022 – Booth 1460, South Hall. Designed specifically for ≤ 200 mm unpatterned wafer inspection, this advanced tool now offers an even higher sensitivity option. This enables it to deliver class-leading 61 nm particle sensitivity and COP defect detection. The new WM-7SR also features sensitivity mode switching, high dynamic range, and high throughput.

Both ClassOne and Takano personnel will be available at the SEMICON West booth to discuss the process and performance details of this new system.

ClassOne also noted that it has a fully-functioning WM-7SR demonstration system set up in its corporate cleanroom facility in Atlanta. Customer consultations, equipment reviews, and running of samples may also be scheduled there.

In 2022, ClassOne Equipment became the exclusive full-service representative for two new state-of-the-art Takano inspection systems in North America, Europe and Israel. The Takano WM-7SR is designed for inspecting 50 mm to 200 mm unpatterned silicon wafers and has open-cassette handling. The Takano WM-10 inspects 150 mm to 300 mm bare wafers with single and dual open-cassette, or single and dual FOUP handler configurations.

The new Takano tools fill a critical need in the semiconductor industry today, replacing long-outdated legacy equipment for inspecting ≤ 200 mm and ≤ 300 mm wafers. It means that today users can obtain brand-new particle inspection systems with leading-edge specifications and performance – and at very attractive prices, only marginally higher than refurbished legacy systems. All Takano inspection systems come with a one-year warranty; and OEM parts and support are available long term, all through ClassOne Equipment.

SEMICON West 2022, July 12-14, will take place in person at the Moscone Center in San Francisco – and also virtually online 24/7. ClassOne Equipment will be in South Hall booth 1460.

Click here to learn more about Takano WM-7SR.